Master of Science in
Semiconductor Science and Technology

The M.S. in Semiconductor Science and Technology provides students with a strong foundation in the fundamental principles, materials, devices, and fabrication technologies that underpin modern semiconductor systems.

Students will develop expertise in two key areas:

Core Knowledge in Semiconductor Science and Technology

Students will develop a strong understanding of solid-state physics, band structure, carrier transport, and quantum effects, learning to apply these principles to analyze and predict the behavior of semiconductor materials and devices. They will also gain an understanding of how semiconductor materials and devices enable circuits and systems for electronic and photonic applications.

Advanced Semiconductor Fabrication and Metrology

Students will gain practical experience with cleanroom-based semiconductor fabrication processes, including deposition, lithography, and etching. They will also learn to evaluate materials and devices using advanced characterization and metrology techniques, including scanning electron microscopy (SEM), transmission electron microscopy (TEM), X-ray diffraction (XRD), ellipsometry, and electrical measurements.

Through this combination of fundamental knowledge and practical experience, students will develop a comprehensive understanding of semiconductor materials, devices, fabrication, and characterization.

International Students: This program is eligible for the OPT STEM extension.

• This program requires completion of 28 units of coursework
• Thesis option and Directed Research (research without thesis) may be requested after completing first semester. Thesis option is not guaranteed
• USC Catalogue
• USC Schedule of Classes